JPH0226935Y2 - - Google Patents
Info
- Publication number
- JPH0226935Y2 JPH0226935Y2 JP15540183U JP15540183U JPH0226935Y2 JP H0226935 Y2 JPH0226935 Y2 JP H0226935Y2 JP 15540183 U JP15540183 U JP 15540183U JP 15540183 U JP15540183 U JP 15540183U JP H0226935 Y2 JPH0226935 Y2 JP H0226935Y2
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- magnets
- magnet
- wafer
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 11
- 239000000463 material Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15540183U JPS6063559U (ja) | 1983-10-06 | 1983-10-06 | スパツタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15540183U JPS6063559U (ja) | 1983-10-06 | 1983-10-06 | スパツタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6063559U JPS6063559U (ja) | 1985-05-04 |
| JPH0226935Y2 true JPH0226935Y2 (en]) | 1990-07-20 |
Family
ID=30343230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15540183U Granted JPS6063559U (ja) | 1983-10-06 | 1983-10-06 | スパツタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6063559U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NO312185B1 (no) * | 2000-01-05 | 2002-04-08 | Kongsberg Automotive Asa | Trykkfluidavgivende innretning |
-
1983
- 1983-10-06 JP JP15540183U patent/JPS6063559U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6063559U (ja) | 1985-05-04 |
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